Highly Efficient Small Anode Ion Source
نویسندگان
چکیده
We describe some modifications to a Bernas-type ion source that improve the beam production efficiency and operating lifetime. The ionization of Bernas type has been improved by using small anode is thin rod, oriented along magnetic field. transverse electric field causes plasma drift in crossed ExB emission slit. cathode material recycling was optimized increase lifetime, wall potential suppress deposition subsequent flake formation. A three-electrode extraction system for low energy efficient space charge neutralization. An with current density up 60 mA/cm2 extracted from modified running on BF3 gas. Space neutralization positive beams injecting electronegative gases.
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ژورنال
عنوان ژورنال: Plasma
سال: 2021
ISSN: ['2571-6182']
DOI: https://doi.org/10.3390/plasma4020013